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- 產品說明
- GENTEC U57 series single-stage regulators are a springless, threadless, point-of-use tied diaphragm design for modern semiconductor manufacturers, equipment manufacturers and end users. Our metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.
- 316L and Hastelloy® body
- Metal to metal diaphragm to body seal
- Easy front panel and rear bracket mounting
- Gauge ports are standard with 1/4” face seal male. Internal 1/4” face seal female is also available
- No springs or threads are exposed to the wetted area
- Standard fully internal electropolished
- Designed for very low particle generation
- Cleaned, assembled and packaged for high purity semiconductor applications
- High-cycle life
- 100% Helium-leak tested
- Wetted
- Body： 316L stainless steel, Hastelloy®
- Seat： PCTFE
- Diaphragm： Elgiloy®, Hastelloy®
- Poppet： 316 stainless steel, Hastelloy®
- Compression Member： 316 stainless steel, Hastelloy®
- Remaining Part： 316 stainless steel, Hastelloy®
Non-wetted - Nut： 316 stainless steel
- Cap： nickel plated brass
- Knob： ABS Plastic
Operating Conditions - Maximum Inlet Pressure： 300 psig (20 barg)
- Outlet Pressure： 0-30 psig (2 barg)
- Temperature： 0°F to 140°F (-18°C to 60°C)
Functional Performance - Flow Capacity： Cv=0.054
- Maximum Leak Rate:
Inboard Leakage： 0.5 x 10-9 atm cc/sec He
Outboard Leakage： 1.0 x 10-9 atm cc/sec He
Across Seat Leakage： 1.0 x 10-9 atm cc/sec He - Proof Pressure： 150% of maximum rated pressure
- Burst Pressure： 400% of maximum rated pressure
Surface Finish - Standard Ra (EP)： 10 μin
- Optional Ra (EP)： 5 μin
Internal Volume
9.3 cc
FEATURES
MATERIALS OF CONSTRUCTION型號參數：Series Body Ports Seat Inlet Pressure Outlet Pressure Gauge Inlet/Outlet Connections Options U57 SL: 316L A: 2 port K: PCTFE G: 300psig L: 0-30psig P: with gauge 91: FSR(1/4"F) E: 5 μin H: Hastelloy® B: 3 port W: without gauge 92: FSR(1/4"M) I: Internal 1/4" FSR(F) gauge ports G: 4 port 41: 1/4" tube weld stub T: Trim Hastelloy® internal J: 4 port
